Method of forming recessed profile on ferrite single crystal by chemical etching
US4875970A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 1988 |
| Grant date | Oct 24, 1989 |
| Priority date | — |
| Expiry date | Dec 29, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49052
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of forming, on a surface of a Mn-Zn ferrite single crystal, a recessed portion which has a predetermined cross sectional profile and at least one straight ridge each of which defines a boundary in the profile. An etching mask is formed on the surface of the ferrite single crystal, so as to provide the recessed portion by etching such that each straight edge of the profile lies in a (100) or (110) plane of the ferrite single crystal which is perpendicular to the surface on which the etching mask is formed. The ferrite single crystal with the etching mask in exposed to an aqueous solution which substantially consists of water and the balance consisting principally of phosphoric acid, whereby the surface of the ferrite single crystal is chemically etched, so as to produce the recessed portion such that an inclined surface is formed so as to extend parallel to the straight ridge, and such that the straight ridge defines an edge of the inclined surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.