Substrate holder for wafers during MBE growth
US4877573A · kind A · utility
7Cited by
6References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 7, 1988 |
| Grant date | Oct 31, 1989 |
| Priority date | — |
| Expiry date | Nov 7, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B23/06
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A holder for supporting a compound semiconductor wafer such as GaAs during MBE heating includes a molybdenum ring, a tantalum ring for supporting the wafer therebetween uniformly about its outer edge, and a sapphire wafer, opposite the compound semiconductor wafer, fixedly attached to the molybdenum ring. The sapphire wafer prevents arsenic loss during heating and transmits infrared radiation to reach the compound semiconductor wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.