Patent · US Expired

Method of manufacturing electrically conductive molded bodies by plasma-activated chemical deposition from the gaseous phase

US4877642A · kind A · utility

13Cited by

8References

13Claims

0Family size

Assignee

U.S. Philips Corporation · US

Inventors

Georg Gartner · Aachen, DE
Hans Lydtin · Stolberg, DE

Key dates

Filing date	Jul 2, 1987
Grant date	Oct 31, 1989
Priority date	—
Expiry date	Jul 2, 2007

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3321
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Layers of electrically conductive material are deposited in a standing microwave field. The deposition is done on an electrically conductive substrate in which a part of the surface forms a part of the inner wall of a microwave cavity resonator. As a result of this the microwave energy is used optimally. Measures are taken to keep the coupling place of the microwave ("window") free from an electrically conductive growth. The substrate is preferably moved periodically or aperiodically relative to the plasma and the remaining walls of the resonator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.