Robotic accessible wafer shipper assembly
US4880116A · kind A · utility
30Cited by
7References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 20, 1988 |
| Grant date | Nov 14, 1989 |
| Priority date | — |
| Expiry date | May 20, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67373
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A robotic accessible wafer shipper assembly comprises a shipper base, a wafer carrier which supports the disks within the base, and a shipper cover which mates with the base and wafer carrier in latching attachment. The base, carrier and cover are provided with certain specific design features which allow them to be handled, as a completely assembled package, by its constituent components and is assembled and disassembled entirely by robotics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.