Organometallic compounds

US4880492A · kind A · utility

Assignee

• Merck Patent GmbH · DE

Inventors

• Dietrich Erdmann · Mühltal, DE
• Max E. Van Ghemen · Darmstadt, DE
• Ludwig Pohl · Darmstadt, DE
• Herbert Schumann · Berlin, DE
• Uwe Hartmann · Berlin, DE
• Wilfried Wassermann · Berlin, DE
• Meino Heyen · Aachen, DE
• Holger Jurgensen · Aachen, DE

Key dates

• Filing date: Sep 15, 1987
• Grant date: Nov 14, 1989
• Expiry date: Sep 15, 2007

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C30B29/40
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In a process for the production of thin films and epitaxial layers by gas-phase deposition, intramolecularly stabilized organometallic compounds are employed as a source of metal.