Method for production of oxide film
US4882183A · kind A · utility
10Cited by
4References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 1988 |
| Grant date | Nov 21, 1989 |
| Priority date | — |
| Expiry date | Apr 6, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/111
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A film of the oxide of a metal selected from the group consisting of Sn, Zr, In, V, Cr, Mn, Fe, Co, Ni, and Cu is deposited on the surface of a substrate by a method which comprises establishing contact between the substrate and a treating liquid containing fluorine and the metal selected as described above thereby having the oxide of the metal dissolved to supersaturation therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.