Device for enriching a carrier gas with the vapor of a sparingly volatile substance
US4883362A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1988 |
| Grant date | Nov 28, 1989 |
| Priority date | — |
| Expiry date | Jan 27, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4481
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An enriching device consisting of a container which comprises a removable tightly fitting metal body the sparingly volatile material being present in a coiled groove. During operation of this device transverse flows and shortcuts, respectively, of the carrier gas flow occur. To assure that the carrier gas flows through the material without having an escape possibility, the groove (5) is made either in an outer wall of the metal body (8) or in the bottom (4) of the container (1), and the parts (6) present between the individual turns of the groove have a cutting edge, i.e. a cross-sectional profile in the form of a wedge, the tip of which is in contact either with the smooth inner wall of the container (1) or with the smooth lower side of the metal body (8). The device is suitable for adjusting a defined mass flow of sparingly volatile materials which are used as starting compounds for chemical deposition from the gaseous phase.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.