Electron cyclotron resonance ion source
US4883968A · kind A · utility
31Cited by
5References
15Claims
0Family size
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Key dates
| Filing date | Jun 3, 1988 |
| Grant date | Nov 28, 1989 |
| Priority date | — |
| Expiry date | Jun 3, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron cyclotron resonance ion source for an ion implanter. The source includes an ionization chamber surrounded along its length by an electromagnet. A number of extraction electrodes at an output end of the ionization chamber allow positively charged oxygen ions to pass through apertures in the electrodes. The uniformity of the axially aligned magnetic field in the ionization chamber is extended through the extraction electrode by a magnetically permeable electrode and through use of non-magnetically permeable material to mount others of said electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.