Apparatus on the carousel principle for coating substrates

US4886592A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Friedrich Anderle · Hanau, DE
• Dan Costescu · Mühlheim am Main, DE
• Stefan Kempf · Alzenau, DE
• Emmerich Manfred NOVAK · Obertshausen, DE
• Jaroslav Zejda · Rodenbach, DE

Key dates

• Filing date: May 20, 1988
• Grant date: Dec 12, 1989
• Expiry date: May 20, 2008

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/139
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A rotatable substrate holder (6) which has a plurality of substrate pickups in a circular arrangement at equal distances apart is disposed in a vacuum chamber (1). A corresponding number of substrates are driven stepwise on a circular path from an air lock station (8, 9) through at least one coating station (10, 11) to the air lock station. To increase the throughput of substrates, the vacuum chamber (1) has two air lock stations (8, 9) and two coating stations (10, 11) one following the other. The step size of the drive (36) on the one hand, and the angular position of each coating station (10 and 11, respectively) with respect to the air lock station associated with it (8 and 9, respectively) with reference to the axis of rotation of the substrate holder (6) on the other hand, are selected such that one and the same coating station (10 and 11, respectively), through the step-wise movement of a particular substrate pickup (63), is associated in each case with one and the same air lock station (8 and 9, respectively).