Multiple electrode plasma reactor power distribution system
US4887005A · kind A · utility
135Cited by
4References
12Claims
0Family size
Inventors
Key dates
| Filing date | Sep 15, 1987 |
| Grant date | Dec 12, 1989 |
| Priority date | — |
| Expiry date | Sep 15, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S422/906
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multiple electrode plasma reactor power circuit that utilizes a power splitting device, such as a center-tapped coil, to deliver balanced power to a plurality of powered electrodes. Balanced plasmas are thereby created between powered electrodes and grounded electrodes. In a preferred embodiment a plurality of center-tapped coils are connected to deliver balanced power to several powered electrodes located in a plurality of reactor chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.