Process for stripping color filter arrays from substrates
US4892616A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 28, 1988 |
| Grant date | Jan 9, 1990 |
| Priority date | — |
| Expiry date | Oct 28, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0007
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A process for stripping a color filter array coating from a substrate of a solid-state color image sensing device to recover the substrate so that it subsequently can be used to produce another solid-state color image sensing device, such process comprising contacting the coating with a stripping solution comprising chromic acid and sulfuric acid for a time effective to remove the coating from the substrate. The process efficiently removes all of the coating, even when the coating has been baked and hardened by various processing steps, and does not adversely affect the electrical properties of the device, the exposed bond pads, or the backside of the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.