Leak detection system
US4893497A · kind A · utility
Inventor
Key dates
| Filing date | Sep 12, 1988 |
| Grant date | Jan 16, 1990 |
| Priority date | — |
| Expiry date | Sep 12, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/226
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A leak-detection system for vacuum vessels and containers. A probe gas, such as helium, is detected flowing out of leaks in the vacuum vessel by directing such leaks to the exhaust of a molecular drap pump providing a high vacuum to a mass spectrometer's detection chamber. The probe gas is injected with dynamic flow having turbulent, laminar and transitional flow-characteristics. The helium flows rearwardly through the molecular drag pump by the process of cavitation and dynamic mixing until it is tranformed into molecular flow and directed to the detection chamber of the mass spectrometer for detection. A series of support pumps back up the molecular drag pump, between any two of which gross probe gas leaks may be introduced. The system of the invention has application to pure gas separation of one gas from a heavier gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.