Test station
US4893914A · kind A · utility
118Cited by
17References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 1988 |
| Grant date | Jan 16, 1990 |
| Priority date | — |
| Expiry date | Oct 12, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test station for use in evaluating semiconductor chips and the like. The test station has improved components for supporting and adjusting the positions of a microscope and stage relative to a base surface which supports a plurality of probes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.