Multi-stage molecular pump
US4893985A · kind A · utility
13Cited by
5References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 15, 1988 |
| Grant date | Jan 16, 1990 |
| Priority date | — |
| Expiry date | Aug 15, 2008 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D19/044
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A molecular pump of the Hollweck type is composed of a plurality of stages in order to improve the pumping characteristics. Rotor and stator consist of different portions which are provided alternately with helical grooves and with smooth outer and inner surfaces respectively. The cooperating surfaces of the individual rotor and stator portions are tapered.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.