Apparatus utilizing charged-particle beam
US4894541A · kind A · utility
57Cited by
8References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 28, 1988 |
| Grant date | Jan 16, 1990 |
| Priority date | — |
| Expiry date | Jul 28, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an apparatus irradiating a specimen with a scanning charged-particle beam to detect x-rays or backscattered electrons emanating from the specimen to display an image thereof on a viewing screen, the beam is fixed on a certain point on the specimen to analyze only that region. The size of the analyzed region is indicated on the viewing screen by a circle, for example, and this circle is superimposed on the image of the specimen. The size of the circle is determined from the accelerating voltage at which the beam is accelerated, the magnification of the image of the specimen, and the mean atomic number of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.