Hollow cathode ion sources
US4894546A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1988 |
| Grant date | Jan 16, 1990 |
| Priority date | — |
| Expiry date | Mar 7, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A hollow cathode ion source for in a vacuum chamber wherein it comprises a cylindrical cathode through one end of which a gaseous medium of at least a discharge maintaining gas or said discharge maintaining gas and a metal vapor is or are introduced, and an anode provided on the other end of said cylindrical cathode and having at least one ion extraction opening, said gaseous medium being ionized by a discharge means between said cylindrical cathode and said anode to produce ions which are extracted through said ion extraction opening in the axial direction of said cylindrical cathode. The cylindrical cathode in the ion source has a large diameter at least about half and preferably about equal to its axial length and may be directly cooled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.