Micromechanical non-reverse valve
US4895500A · kind A · utility
Inventors
Key dates
| Filing date | Apr 7, 1989 |
| Grant date | Jan 23, 1990 |
| Priority date | — |
| Expiry date | Apr 7, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7891
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A silicon micromechanical non-reverse valve. In a main surface of a silicon wafer there is provided a cavity and a cantilever beam. The beam extends over the cavity and is integrally formed with the wafer at its top portion. The beam is provided at a distance above the bottom wall of the cavity. A second wafer of silicon or glass is provided over the first silicon wafer and covers the cavity in order to form a chamber. A second wafer is provided with two openings one of which is situated within the outline of the beam and the other of which is situated outside said outline. The first opening acts as an inlet and the second opening as an outlet for the valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.