Electron detector for use in a gaseous environment
US4897545A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 14, 1988 |
| Grant date | Jan 30, 1990 |
| Priority date | — |
| Expiry date | Oct 14, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2605
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved gaseous detector device for an environmental scanning electron microscope (ESEM) is provided. The detector device includes a generally annular electrode assembly having an inner electron detector formed of a thin ring, an intermediate electron detector positioned radially outwardly of the inner electron detector which is formed of a first plurality of concentric arc segments, and an outer electron detector positioned radially outwardly of the intermediate electron detector which is formed of a second plurality of concentric arc segments. The first plurality of concentric arc segments is positioned generally normal to the second plurality of concentric arc segments to obtain a directional topographic contrast. The inner, intermediate and outer electron detectors are aligned along generally the same horizontal plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.