Polishing apparatus
US4897966A · kind A · utility
Assignees
Inventor
Key dates
| Filing date | Aug 18, 1987 |
| Grant date | Feb 6, 1990 |
| Priority date | — |
| Expiry date | Aug 18, 2007 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for polishing one of opposite faces of a slab member includes a surface plate, a mounting member, an urging shaft and a pressure transmitting member. The surface plate has a flat upper surface and is rotatable about an axis perpendicular to the upper surface. The mounting member has an upper face and a lower face to which the other face of the slab member is fixedly secured, and is disposed above the surface plate in such a manner that the one face of the slab member to be polished is held in contact with the upper surface of the surface plate. The urging shaft is connected to the mounting member for urging the mounting member toward the surface plate at a prescribed urging pressure to bring the one face of the slab member into pressure contact with the upper surface of the surface plate. The pressure transmitting member is interposed between the mounting member and the urging shaft for causing the urging pressure of the urging shaft to exert on the upper face of the mounting member. The transmitting member has a deformable chamber which contains a fluid therein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.