Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector

US4900932A · kind A · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Norbert Schafer · Oberkochen, DE
• Eugen Weimer · Oberkochen, DE
• Herbert Gross · Santa Ana, US
• Bernd Eppli · Königsbronn, DE
• Eberhard Rossow · Oberkochen, DE

Key dates

• Filing date: Sep 1, 1988
• Grant date: Feb 13, 1990
• Expiry date: Sep 1, 2008

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2808
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.