Resonant-bridge two axis microaccelerometer
US4901570A · kind A · utility
36Cited by
6References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 1989 |
| Grant date | Feb 20, 1990 |
| Priority date | — |
| Expiry date | Jan 30, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S73/01
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resonant bridge two-axis microaccelerometer is disclosed comprising polysilicon resonant bridges orthogonally attached to a silicon proof mass, such that the silicon proof mass is suspended by the resonant bridges. Acceleration in the plane of the substrate causes differential axial loads on the opposing microbridges in each pair, thereby shifting their resonant frequencies. The acceleration component aligned with a pair is measured by the difference in resonant frequencies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.