Electrostatically driven dual vibrating beam force transducer
US4901586A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1989 |
| Grant date | Feb 20, 1990 |
| Priority date | — |
| Expiry date | Feb 27, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S73/01
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dual vibrating beam force transducer having an electrostatic drive system. The transducer comprises a body having first and second generally parallel beams, coupled together at their ends. First and second electrodes are positioned adjacent to but not in contact with the respective beams. A drive circuit causes an oscillating voltage to be applied to the electrodes. The beams are thus subjected to electrostatic forces that cause the beams to oscillate in a vibration plane containing both beams. The mechanical resonance of the beams controls the oscillation frequency, such that the frequency is a function of a force exerted along the beams. An embodiment is also described in which the drive means is coupled directly to one of the beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.