Patent · US Expired

Device including a substrate-supported optical waveguide, and method of manufacture

US4902086A · kind A · utility

31Cited by
2References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 3, 1988
Grant dateFeb 20, 1990
Priority date—
Expiry dateMar 3, 2008

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/125
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

In the manufacture of optical devices such as, e.g., optical communications assemblies and optical gyroscopes, low-loss substrate-supported optical waveguides are desired. Such waveguides can be obtained by patterning a layer of deposited waveguide material and, in the interest of minimizing loss as may be due to processing-induced surface roughness, waveguides as patterned preferably undergo a heat treatment which results in surface smoothing and in rounding of the waveguide cross section. Furthermore, in the interest of avoiding re-entrant corners between substrate and waveguide, a wetting layer may be applied to the waveguide prior to heat treatment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.