Method and arrangement for mechanically moving of a magnetic field generating device in a cathode arc discharge evaporating device
US4902931A · kind A · utility
8Cited by
0References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 1988 |
| Grant date | Feb 20, 1990 |
| Priority date | — |
| Expiry date | Mar 15, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/325
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and device are provided to prevent grooves from occurring on a cathode surface of a cathode arc discharge evaporating device by adding a second movement to a first rotational movement of a magnetic field generator within the device, which enables the arc spot to scan a substantial portion of the cathode surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.