Railway carrier apparatus for semiconductor wafers
US4903610A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Nov 25, 1987 |
| Grant date | Feb 27, 1990 |
| Priority date | — |
| Expiry date | Nov 25, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6773
- WIPO fieldTransport
- WIPO sectorMechanical engineering
Abstract
A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.