Surface wave launchers to produce plasma columns and means for producing plasma of different shapes
US4906898A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 8, 1988 |
| Grant date | Mar 6, 1990 |
| Priority date | — |
| Expiry date | Aug 8, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/46
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to a device for generating plasma (ionizing gas) by a propagating surface wave. The device comprises a wave launching structure mounted on a plasma vessel and connected to an impedance matching network. The latter comprises a coupler and a tuner which is either formed by a section of a transmission line or is of the lumped circuitry type. The launching structure may either generate an azimuthally symmetric or a non symmetric propagating wave. This invention also relates to a method and a device for shaping plasma which comprises a plasma vessel receiving a surface wave generator and having a serviceable portion of a size and/or shape substantially different from the shape and/or size of the portion of the plasma vessel receiving the wave generator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.