Coaxial cavity type, radiofrequency wave, plasma generating apparatus
US4906900A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 30, 1989 |
| Grant date | Mar 6, 1990 |
| Priority date | — |
| Expiry date | Apr 30, 2009 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B23/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A coaxial radiofrequency wave plasma generating apparatus with an elongate metallic cavity (10) having a movable elongate coupling probe (16) mounted in line with an axis (a--a) of the cavity having a central coaxial conductor (11) and having a movable plate (12) for obtaining a mode of resonance of the radiofrequency wave in the cavity surrounding a chamber (14) for confining the plasma (100) is described. An end (11b) of the conductor is adjacent to the chamber and can optionally support a set of magnets (27). The apparatus is particularly useful for retrofitting existing vacumm sources (101) having small inlet ports (105) for plasma treatment using molecular beam epitaxy (MBE).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.