Computerized multi-zone crystal growth furnace precise temperature and heating control method
US4907177A · kind A · utility
11Cited by
7References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 31, 1988 |
| Grant date | Mar 6, 1990 |
| Priority date | — |
| Expiry date | Oct 31, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S117/90
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A computerized method of digitally controlling the temperature profile of a heated article in which the temperature profile is defined by a plurality of temperature zones spaced about the article. The temperature profile of the article is monitored and a heating cycle requirement of the temperature zones of the profile is computed. A train of minute increments of power is supplied to heat each respective zone in accordance with the computed heating cycle requirements to achieve a precision approximately between .+-.0.1.degree. and .+-.0.5.degree. C. in a temperature range of approximately 400.degree. C. to 1,350.degree. C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.