Image correction system for scanning electron microscope
US4907287A · kind A · utility
30Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1989 |
| Grant date | Mar 6, 1990 |
| Priority date | — |
| Expiry date | Mar 31, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0216
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An image correcting apparatus for correcting distortion appearing in an image produced by electron beam scanning in a SEM under the influence of electric, magnetic and mechanical vibrations through arithmetic operations for eliminating the distortion. Installation of electric shield, magnetic shield and vibration-damping structure is thus rendered unnecessary.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.