Apparatus for inspecting the appearance of semiconductor devices
US4907701A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 19, 1988 |
| Grant date | Mar 13, 1990 |
| Priority date | — |
| Expiry date | Aug 19, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S209/939
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting the appearance of a semiconductor device has an imaging device which forms an image of the outside of a semiconductor device. An image analyzer analyzes the image and determines whether the semiconductor device is good or bad. A semiconductor device to be inspected is removed from a first conveyor on the periphery of a turntable by a vacuum chuck which is mounted on the turntable, and the semiconductor device is transported to in front of the imaging device by a turntable. If the semiconductor device is determined to be good, the turntable transports the semiconductor device to a second conveyor on the periphery of the turntable, and the vacuum chuck deposits the semiconductor device on the second conveyor. If the semiconductor device is determined to be bad, the turntable transports the semiconductor device to a discard receiving mechanism on the periphery of the turntable, and the vacuum chuck deposits the semiconductor device on the discard receiving mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.