Heating lamp assembly for ccvd reactors
US4908495A · kind A · utility
11Cited by
10References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 1988 |
| Grant date | Mar 13, 1990 |
| Priority date | — |
| Expiry date | Dec 20, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/0047
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A heating lamp assembly for use with semiconductor reactors has a reflector assembly constructed of tubes joined together by heat conductive spacers to provide for water cooling of the reflector assembly, has mounting pins for providing variable spacing of heating lamps, and water manifolds on each side of the reflector assembly for directing water through the cooling tubes. One or more blocking gates are mounted on the lamp mounting pins to direct cooling air flow across the heating lamps.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.