Direct imaging type SIMS instrument
US4912326A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 14, 1988 |
| Grant date | Mar 27, 1990 |
| Priority date | — |
| Expiry date | Sep 14, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/32
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is disclosed a direct imaging type SIMS (secondary ion mass spectrometry) instrument having a mass analyzer comprising superimposed fields. The superimposed fields consist of a toroidal electric field and a uniform magnetic field substantially perpendicular to the electric field. In said electric field, the central orbit of the ion beam is located in an equipotential plane. The mass analyzer causes an image of the region on the sample bombarded with a primary beam to be focused onto a two-dimensional detector to form a mass-filtered ion image. The SIMS instrument can operate in a mode where only the intensity of the magnetic field of the mass analyzer is set equal to zero. In this mode, only ions having a selected energy within a certain energy bandwidth produce an image, that is, an energy-filtered ion image is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.