Low power solid state gas sensor with linear output and method of making the same
US4916935A · kind A · utility
8Cited by
17References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 1989 |
| Grant date | Apr 17, 1990 |
| Priority date | — |
| Expiry date | Jan 23, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is directed towards a low power, solid state gas sensor and method of making the same. The sensor comprises a heating element formed from a wire coiled about an axis, a sensing whisker placed inside the heating coil substantially in plane with said axis, and a metal oxide semiconductor material whose resistance varies with the object gas concentration. The gas sensors of this type operate at less than 150 mA. In addition, gas sensors of the present invention exhibit a substantially linear response over a significant concentration of the object gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.