Patent · US Expired

Near field scanning optical microscopy

US4917462A · kind A · utility

99Cited by
15References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 16, 1989
Grant dateApr 17, 1990
Priority date
Expiry dateAug 16, 2009

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An aperture probe in the form of a tapered metal-coated glass pipette having a thin tip provides near-field access to a sample for near-field microscopy. The pipette is formed from a glass tube drawn down to a fine tip, and then coated, as by evaporation, by a metallic layer. The central opening of the tube is drawn down to a submicron diameter, and the metal coating is formed with an aperture at that opening. Aperture diameters down to 500 Angstroms diameter are provided. Also disclosed is a microscope utilizing the pipette aperture for scanning near-field imaging of samples.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.