Modular wafer transport and processing system
US4917556A · kind A · utility
634Cited by
15References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 26, 1989 |
| Grant date | Apr 17, 1990 |
| Priority date | — |
| Expiry date | May 26, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A modular wafer processing machine is provided which is based on interconnected handling units having wafer handling arms. Each unit can pass a wafer to another unit in the same vacuum environment to a processing module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.