Membrane probe with automatic contact scrub action
US4918383A · kind A · utility
Inventors
Key dates
| Filing date | Sep 28, 1988 |
| Grant date | Apr 17, 1990 |
| Priority date | — |
| Expiry date | Sep 28, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/0735
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus [10] for providing an automatic lateral scrubbing motion when a test membrane [22] engages a device under test (DUT) (not shown). Included are a fixed length flexure pivot assembly [30] and a pair of variable length flexure pivot assemblies [38]. Signal traces, signal trace terminals, and contact bumps [23, 25, 60] are formed for communicating electrical signals between the apparatus [10] and the DUT. A membrane [22] is stretched and configured for carrying the signal traces, signal trace terminals, and contact bumps [23, 25 and 60]. A hexagonal translation stage [28] is formed with an upper surface [29] disposed for being coupled to at lesat one of the fixed and variable length flexure pivot assemblies [30 and 38], and formed with a lower surface [54]. Surface [54] is formed to define an aperture [51] through itself, formed for securing over itself the membrane [22] when stretched; it is disposed for being coupled to membrane [22]. Finally included is a carrier [12], formed for suspending the hexagonal translation stage [28] and fixed and variable length flexure pivot assemblies [30 and 38].
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.