Method for producing electrically conductive carbon film
US4919779A · kind A · utility
8Cited by
2References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 1988 |
| Grant date | Apr 24, 1990 |
| Priority date | — |
| Expiry date | Aug 17, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/0605
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A carbon film having a larger electrical conductivity is produced on a substrate by an ion beam method comprising steps of ionizing an organic compound having at least one substituent selected from the group consisting of a carbonyl group, an aldehyde group, an acyl group, an acid anhydride group, an amino group, a nitro group, a hydroxyl group, an alkoxyl group, a thiol group and a halogen or a cluster of said organic compound with an ion beam which accelerates ionized species towards a substrate by an electric field and forming a carbon film on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.