Articles having coatings of fine-grained and/or equiaxed grain structure
US4920012A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 1989 |
| Grant date | Apr 24, 1990 |
| Priority date | — |
| Expiry date | Jun 9, 2009 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/1284
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Fine-grained and/or equiaxed tungsten and/or rhenium coatings, substantially free from columnar structure, are deposited on substrates (especially graphite) by chemical vapor deposition by directing the flow of reactant gases to the substrate with high velocity and in close proximity thereto, most often at a velocity gradient of at least about 1050 and preferably at least about 2000 cm./cm.-sec. The deposition process is preferably conducted while moving the substrate so as to coat large areas thereof. By this method, tungsten and/or rhenium-coated articles useful as X-ray targets having excellent properties under conditions of rapid temperature cycling may be produced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.