Process for coating a substrate with an organic coating having gradated hardness
US4921724A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1987 |
| Grant date | May 1, 1990 |
| Priority date | — |
| Expiry date | Nov 12, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3299
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an apparatus for coating a substrate with an organic substance by placing the substrate in a coating chamber containing a gaseous hydrocarbon compound, in which the hydrocarbon compound can be broken down by means of a cathode system having magnets, a plasma is formed in the vicinity of the substrate by applying a radiofrequency voltage to the cathode system while the substrate is held immediately in front of the cathode. The pressure in the coating chamber and the supply of the electric energy from the generator to the cathode are variable for the purpose of achieving a coating quality that will change during the build-up of the coating. For this purpose, electric motor-powered valve means are inserted into the gas supply line and into the pump suction line and are operated through a timing mechanism or a control apparatus which is connected to a vacuum gauge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.