Method and apparatus for calibrating deformable mirrors having replaceable actuators
US4923302A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 1989 |
| Grant date | May 8, 1990 |
| Priority date | — |
| Expiry date | Feb 2, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus and method for calibrating deformable mirrors having replaceable actuators are disclosed. The mirror to be calibrated is mounted on an x-y table to permit selective movement of the mirror between an actuator position adjustor means and a sensor probe which senses the extent of deflection of the mirror's reflecting surface. A light source provides a source of illumination for selectively illuminating areas of the reflecting surface in the vicinity of an actuator to be adjusted. A photodetector array receives the reflected light and transmits its output to a controller which computes the distance between the sensor probe and the reflecting surface. The controller may be used to selectively energize the actuator position adjustor means to control the extent that one or more actuators influence the shape of the mirror's reflecting surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.