Pressure measurement system
US4924701A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 6, 1988 |
| Grant date | May 15, 1990 |
| Priority date | — |
| Expiry date | Sep 6, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0075
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure measurement system comprising a capacitance device whose outer interrelated capacitance plates are maintained in a relatively fixed position relative to one another while an intermediate capacitance plate responds to temperature. The plates are in a restricted enclosure containing a gas dielectric medium. The pressure of the gas dielectric medium (and consequently the density of the gas) is controlled as a function of a pressure to be measured. By measurement of capacitance relationships as a function of the temperature and density of the gas dielectric medium, a pressure measurement is obtained. The system is constructed with like types of materials where the capacitance device is in an enclosure chamber which is immersed in a pressure media. The capacitance device is constructed with a symmetrical arrangement to balance out effects of gravity or vibration. Construction of micro components utilizes an electrostatic bonding system which eliminated arcing during bonding.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.