Multiple, parallel packed column vaporizer
US4924936A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 5, 1987 |
| Grant date | May 15, 1990 |
| Priority date | — |
| Expiry date | Aug 5, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/54
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A multiple, parallel packed column vaporizer for vaporizing a chemical having a relatively low decomposition temperature includes a shell; a plurality of parallel, vertically oriented vaporization columns arranged in the shell, each vaporization column having inner walls and upper and lower open ends; a distribution assembly for distributing the chemical substantially equally to the open upper ends of the vaporization columns, which flows downwardly therein; a heat exchanger which heats the vaporization columns to provide the heat needed to vaporize the chemical therein; and a gas supply which supplies the gas to the lower ends of the vaporization columns so that the chemical is vaporized and becomes entrained in the gas and is carried upwardly out of the vaporizer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.