Microlithographic process for producing circuits using conductive organic films sensitive to electromagnetic radiation and to charged particles, as well as to the circuits and components obtained by this process
US4925774A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 1988 |
| Grant date | May 15, 1990 |
| Priority date | — |
| Expiry date | Mar 24, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/168
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention relates to a microlithographic process for producing circuits using organic, conductive films sensitive to electromagnetic radiation and to charged particles. This process for producing electricity conducting zones on a substrate consists of depositing on said substrate a coating of an electricity conducting, organic compound, such as alkyl pyridinium-tetracyanoquinodimethane and then irradiating certain locations (2,3) of the coating by means of charged particles and/or electromagnetic radiation, so that the irradiated locations become insulating and that on the organic compound coating the electricity conducting zones (1) are directly formed at the desired locations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.