Microelectronic field ionizer and method of fabricating the same
US4926056A · kind A · utility
45Cited by
10References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 10, 1988 |
| Grant date | May 15, 1990 |
| Priority date | — |
| Expiry date | Jun 10, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/0807
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectronic field ionizer and alternate fabrication procedures for the same are described. The field ionizer has an array of small diameter gas outlets in the form of microvolcanos. A counterelectrode layer of material is provided on the microelectronic substrate, in the registration with the gas outlets.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.