Automated laminography system for inspection of electronics
US4926452A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1987 |
| Grant date | May 15, 1990 |
| Priority date | — |
| Expiry date | Oct 30, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/304
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tomographic inspection system wherein the electron beam of a microfocus X-ray tube is deflected in a circular scan pattern onto the tube anode in synchronization with a rotating detector that converts the X-ray shadowgraph into an optical image and derotates the image so as to be viewed and integrated in a stationary video camera. A computer system controls an automated positioning system that supports the item under inspection and moves successive areas of interest into view. In order to maintain high image quality, a computer system also controls the synchronization of the electron beam deflection and rotating optical system, making adjustments for inaccuracies of the mechanics of the system. The computer system can also operate under program control to automatically analyze data, measure characteristics of the item under inspection and make decisions regarding the acceptability of the item's quality. The invention produces high resolution images in rapid succession so as to be suitable for use in conjunction with manufacturing production lines and capable of inspecting electronic devices, solder connections, printed wiring boards and other assemblies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.