Horizontal laminar air flow work station
US4927438A · kind A · utility
53Cited by
20References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1988 |
| Grant date | May 22, 1990 |
| Priority date | — |
| Expiry date | Dec 22, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S55/29
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A load chamber of a load lock is provided with a vertical air curtain which isolates the load chamber from the general clean room environment. Horizontal air flows generated in the load chamber bathe wafers held horizontally in the chamber with filtered air. These horizontal air flows are captured by the air curtain and recirculated to filters which provide horizontal and vertical air flows in the load chamber. If desired, the vertical and horizontal flows may be driven by the air supply mechanism of the clean room itself.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.