Method and arrangement for fabricating magneto-optical, storable, and/or deletable data carriers
US4927513A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 1989 |
| Grant date | May 22, 1990 |
| Priority date | — |
| Expiry date | Jan 6, 2009 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for fabricating magneto-optical, storable, and/or deletable data carriers. One or more layers, each comprising two or more different chemical materials, are applied on a substrate (4) by means of a magnetron sputtering system (1). The fractional composition of each layer is controlled by changing the strength of the magnetic field produced by the magnetron system (1). By means of a suitable measuring device (51, 58) the compensation temperature of a particular layer is measured and compared with a desired value. If the measured compensation temperature differs from the desired value, the desired value can be attained by adjusting the cathode voltage U.sub.K of the magnetron system. A controller (63) is provided for controlling the cathode voltage and adjusting the distance between the magnetron system's target (6) and magnets (8, 9, 10).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.