Method for manufacturing organic thin film
US4927589A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 1988 |
| Grant date | May 22, 1990 |
| Priority date | — |
| Expiry date | Dec 21, 2008 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y40/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A film manufacturing method which utilizes a trough storing a liquid therein. The liquid surface of the liquid forms a developing region in which a monomolecular film of organic molecules is developed. The developed monomolecular film is compressed by a barrier to a predetermined surface pressure. A workpiece having a build-up surface is moved by a vertical moving mechanism in a direction perpendicular to the developing region through the monomolecular film while being moved ahead of the build-up surface in a horizontal direction by a horizontal moving mechanism, so that the monomolecular film is built up on the build-up surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.