Patent · US Expired

Method for manufacturing organic thin film

US4927589A · kind A · utility

4Cited by
6References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 21, 1988
Grant dateMay 22, 1990
Priority date
Expiry dateDec 21, 2008

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB82Y40/00
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A film manufacturing method which utilizes a trough storing a liquid therein. The liquid surface of the liquid forms a developing region in which a monomolecular film of organic molecules is developed. The developed monomolecular film is compressed by a barrier to a predetermined surface pressure. A workpiece having a build-up surface is moved by a vertical moving mechanism in a direction perpendicular to the developing region through the monomolecular film while being moved ahead of the build-up surface in a horizontal direction by a horizontal moving mechanism, so that the monomolecular film is built up on the build-up surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.