Electro-optic signal measurement
US4928058A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 23, 1989 |
| Grant date | May 22, 1990 |
| Priority date | — |
| Expiry date | May 23, 2009 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/071
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Electro-optic probes which are adapted to be placed in the fringe field from electrical signals propagating on conductors (which may be conductors of an integrated circuit) and which modulate optical pulses passing therethrough, for example by modulating the polarization of the light in accordance with the Pockels effect, utilize thin bodies of electro-optic material, such as a single crystal of GaAs in a manner to reduce physical damage to the probe and to the circuit and to precisely locate the probe in the field of the signal being measured, such as adjacent to the conductor of interest. The electro-optic material that is used may also be implanted with high energy ions of low Z materials (e.g. hydrogen or oxygen) so as to create charge trapping sites and to reduce the photo conductivity of the semiconductive electro-optic material sufficiently that the dielectric relaxation time (where photo current through the material reduces by 1/e) is less than the duration of the optical pulses without eliminating the electro-optic (e.g. Pockels) effect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.