Laser power control system
US4928284A · kind A · utility
12Cited by
4References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 20, 1989 |
| Grant date | May 22, 1990 |
| Priority date | — |
| Expiry date | Jun 20, 2009 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/702
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser power beam control system includes a photodetector for generating an electrical signal which is proportional to the power level of the laser beam. The electrical signal is converted to a high frequency modulated signal which controls a single acousto-optical modulator. The acousto-optical modulator is in the laser beam path and controls the power level of the beam in response to the amplitude modulated signal. The system is particularly adapted to control a laser beam used in raster or vector scanning a laser for the formation of semiconductor integrated circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.